Program : Sustainable Energy Materials (SEM)

Degree : PhD

Course Code : ACE 731

Course Name : Design and Fabrication of Electromechanical Devices

Course Category : Compulsory Core Courses

Semester : First Semester

Credit Hours : 3

Microsystems design: material properties, fabrication technologies, structural behavior, sensing methods, fluid flow, microscale transport, noise, and amplifiers feedback systems. Design of microsystems (sensors, actuators, and sensing/control systems) of a variety of types, (e.g., optical MEMS, bioMEMS, inertial sensors) to meet a set of performance specifications (e.g., sensitivity, signal-to-noise) using a realistic microfabrication process, modelling and simulation in the design process.