Program : Sustainable Energy Materials (SEM)

Degree : MSc/MEng

Course Code : ACE 632

Course Name : Nanotechnology and Thin Film Technology

Course Category : Compulsory Core Courses

Semester : Second Semester

Credit Hours : 2

Review of Quantum Mechanics. Nanosystems. Molecular dynamics. Scanning Probe Microscopy. Nanomaterials: Production and characterization of nanoparticles. Design of nanostructured systems. Nanomechanics of materials, Applications of nanosystems in the
industry. Development of quantitative understanding of the different intermolecular forces between atoms and molecules and how these forces give rise to interesting phenomena at the nanoscale, such as flocculation, wetting, Preparation of Nanoscale Materials: Precipitation, mechanical milling, colloidal routes, self-assembly; vapour phase deposition, MOCVD, 27 sputtering, evaporation, molecular beam epitaxy, Chemical spray pyrolysis atomic layer epitaxy, microelectronics. Patterning and Lithography for Nanoscale Devices: Optical/UV, electron beam and X-ray lithography systems and processes, wet etching, dry (plasma/reactive ion etching), etch resists